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   Russian

 

 

   IPTM RAS
   Chernogolovka
  
2017

 

   

 

Dear Sir/Madam, we are glad to inform you about the 2nd International Forum on electron beam technology for microelectronics "Technounity - EBTM 17", organized by Institute of Microelectronics Technology and High Purity Materials  RAS (IMT RAS) Chernogolovka, Moscow City Enterprise "Zelenograd Development Corporation", Zelenograd,  "Mikron" ˇompany Moscow, Zelenograd,  which will be held in Moscow, Zelenograd,  from 9 to 13 October 2017

 

List of sections  
 

Section 1. Characterization of semiconductor materials and structures.

Section 2. Electronic and ion lithography.
Section 3. Characterization of materials by TEM methods.
Section 4. Characterization of materials by SEM methods.
Section 5. Scanning Ďrobe microscopy.
Section 6. New materials.

 

Master classes of the 2nd International forum "Technouniti - ELTM 2017":     

"Sernia Engineering" - "Digital optical 3D microscopy by example Microscope VHX-5000 Keyence"(more details here).

Time: from 9 to 12 October.

 

The Forum will be devoted to the analysis of the state of research and development in the field of electron and ion-beam technologies and their applications in lithography, surface nanostructuring and the production of materials for micro- and nanoelectronics. Questions of application of methods of electronic, X-ray and probe microscopy for the analysis of materials and structures of electronic equipment will also be considered. It is supposed to hear reports about new research and development carried out in the laboratories of institutes of the RAS and higher educational institutions, and discuss the problems of diagnostics of materials and structures facing scientists and engineers working in the electronics industry.

 

The largest manufacturers of equipment for microelectronics will be represented on the Forum platforms, scientific and practical master classes for students and young scientists will be held.

 

Forum program  (pdf)  

 

The Organizing Committee of the Forum invites leading Russian scientists in the field of electron microscopy, representatives of the Russian industry dealing with the design and production of electron probe equipment, and graduates of Russian high schools showing interest to electron microscopy. Foreign scientists wishing to participate in the 2nd International Forum on electron beam technology for microelectronics "Technounity  - EBTM 17", and  representatives of foreign firms are also kindly invited to the Forum.

 

Organizing Committee Forum 2017:

 

     Krasnikov G.Ya. - Academician of the RAS, "Micron", Moscow, Zelenograd - the cochairman
     Roshchupkin D.V. -
Doctor of Physical and Mathematical Sciences, IMT RAS, Chernogolovka
                             - the cochairman
     Zaytsev V.V. - "Zelenograd Development Corp.", Zelenograd - the cochairman

 

Gornev Ye.S. - Doctor of Technical Sciences, "Micron", Moscow, Zelenograd

                   - the deputy chairman

     Yakimov E.B. - Doctor of Physical and Mathematical Sciences, IMT RAS, Chernogolovka

                       - the deputy chairman
     Ovsyannikov M.A. - "Zelenograd Development Corp.", Zelenograd - the deputy chairman

     Kazmiruk V.V. -
Doctor of Physical and Mathematical Sciences, IMT RAS, Chernogolovka
                        - the deputy chairman

 

     Borodin A.V. - Doctor of Technical Sciences, "EZAN", Chernogolovka

Latyshev A.V. - Academician of the RAS, ISP SB RAS, Novosibirsk

Lukichev V.F. - Corresponding member of the RAS, FTIAN, Moscow

Nikitov S.A. - Corresponding member of the RAS, IRE RAS, Fryazino

Osipov N.A. - IMT RAS, Chernogolovka

Savitskaya T.N. - IMT RAS, Chernogolovka

     Chaplygin Yu.A. - Academician of the RAS, National Research University of
                             Electronic Technology
, Zelenograd
     Yatsukova V.V. -
"Zelenograd Development Corporation", Zelenograd

 

Program committee:

 

Aristov V.V. - Corresponding member of the RAS, IMT RAS, Chernogolovka - the chairman

Yakimov E.B. - Doctor of Physical and Mathematical Sciences, IMT RAS, Chernogolovka

                  - the deputy chairman

 

Borgart N.I. - Doctor of Physical and Mathematical Sciences, National Research University
              of Electronic Technology
, Zelenograd  

Kalnov V.A. - Doctor of Technical Sciences, FTIAN, Moscow

Kapchenko I.V. - Doctor of Technical Sciences, Czech Republic

Knyazev M.A. - Doctor of Physical and Mathematical Sciences, IMT RAS, Chernogolovka

Maltsev P.P. - Doctor of Technical Sciences, ISVCPE RAS, Moscow

Nikolaychik V.I. - Doctor of Physical and Mathematical Sciences, IMT RAS, Chernogolovka

Rau E.I. - Doctor of Physical and Mathematical Sciences, Lomonosov Moscow State

              University (MSU), Moscow

Roshchupkin D.V. - Doctor of Physical and Mathematical Sciences, IMT of
                     the RAS, Chernogolovka

Tolstikhina A.L. - Doctor of Physical and Mathematical Sciences, Federal Research
                   Center "Crystallography and Photonics" of the RAS,Moscow

 

Local Committee: 

 

    Nikolaychik V.I. - Doctor of Physical and Mathematical Sciences, IMT RAS, Chernogolovka
    - the chairman

    Kazmiruk L.A - IMT RAS, Chernogolovka

    Osipova G.Yu. - IMT RAS, Chernogolovka

    Frolova O.A - IMT RAS, Chernogolovka

    Kurganov.I.G. - IMT RAS, Chernogolovka

    Podkopaev A.A - IIMT RAS, Chernogolovka

    Kozlov A.V. - IMT RAS, Chernogolovka

    Chichagova R.I. - IMT RAS, Chernogolovka

 

Venue

 

The 2nd International Forum on electron beam technology for microelectronics "Technounity - EBTM 17" will be held in Moscow, Zelenograd, Yunosti street, Building 8, "TEHNO YUNITI" Zelenograd innovation cluster (124482, Yunosti str., bldg. 8, Zelenograd, Moscow, the Russian Federation).


Zelenograd - one of the main scientific and industrial centers of the Russian microelectronics. Located 37 km north-west of Moscow city center and 15 kilometers from the Sheremetyevo International Airport. Zelenograd - one of the 12 administrative districts of Moscow.

 

 

More details about the place of the 2nd International Forum on electron beam technology for microelectronics "Technounity - EBTM 17".

 

Abstracts

 

To prepare abstracts, you can use this template.

 

Please send abstracts of your scientific report  by mail giza@ipmt.ru (not by Fax). 

Attention!  Deadline for abstracts:  April 28, 2017

 

Registration


The information will be announced later.

 

If you are going to participate in the Forum, please, fill in the registration form.
 

Accommodation


Hotels in the city of Zelenograd. You should book a room on their own
.
 

Important Dates:

 

Registration starts on March 16, 2017.
The deadline for the acceptance of abstracts is
May 10, 2017.
         

Contact Address:

 

V.V. Kazmiruk - deputy-chairman

Tel:(495) 962-80-53 (495) 962-80-74,
Fax:(495) 962-80-47, E-mail:
kazmiruk@iptm.ru
giza@ipmt.ru

 

Visa Application

 

Dear colleagues, the Organizing committee does not apply for visas.
 

Forum Organizers   

 

 

Institute of Microelectronics Technology
and High Purity Materials  Russian academy of scinceChernogolovka  
  "TEHNO YUNITI"
Zelenograd innovation cluster,
Moscow, Zelenograd

"Mikron" ˇompany Moscow, Zelenograd

 

Sponsor Forum 2017

 



The 2nd International Forum "Technounity - EBTM 17" is supported by the Russian Foundation for Basic Research
 



and firms:
 

 




For problems, suggestions, or questions, please contact: 

 

Dr. V.V. Kazmiruk

L.A. Kazmiruk

  Forum deputy-chairman
IMT RUS,
Chernogolovka,
Moscow district, 
142432, Russia  
kazmiruk@iptm.ru

IMT RUS,
Chernogolovka,
Moscow district, 
142432, Russia  
giza@ipmt.ru

 

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Institute of Microelectronics Technology and High Purity Materials  RAS
Last updated: 02.10.17